发明名称 DEVICE AND METHOD FOR DETECTING FLATNESS
摘要 <p>PROBLEM TO BE SOLVED: To provide a device for detecting flatness capable of detecting flatness at a high speed, and further to provide a method for detecting flatness.SOLUTION: A device 1 for detecting flatness comprises: point group data acquiring means 21 for acquiring point group data from a three-dimensional measuring device 2 which performs shape measurement of three-dimensional positions (x, y and z) of a plurality of places of an object (work-piece) surface and generates the point group data constituted of three-dimensional positions of individual ones of the plurality of places; coordinate converting means 22 for converting an x coordinate value and a y coordinate value into integers out of the three-dimensional positions (x, y and z) in the point group data and calculating a z coordinate representative value with respect to each of the x and y coordinate values; z integrated value calculating means (integration height calculating means 26) for calculating a z integrated value obtained by integrating the z coordinate representative value with respect to a plurality of sub-regions obtained by dividing an x-y plane region; and comparing means 28 for comparing the z integrated value of the sub-region divided and the z integrated value of the sub-region adjacent to the sub-region divided.</p>
申请公布号 JP2015090358(A) 申请公布日期 2015.05.11
申请号 JP20130231436 申请日期 2013.11.07
申请人 SEIKO EPSON CORP 发明人 NAGAHASHI TOSHINORI
分类号 G01B21/30 主分类号 G01B21/30
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