LAMB WAVE-BASED SENSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a Lamb wave-based sensing device 10 that suppresses degradation of pressure detection sensitivity.SOLUTION: A Lamb wave-based sensing device 10 includes a diaphragm structure 20 and a device chip 30. The device chip 30 comprises a diaphragm structure 40 and a pair of comb-teeth shaped electrodes 50a and 50b. Variation in resonance frequency of the device chip 30 is detected to detect pressure exerted on a back surface side of a diaphragm 44 through a diaphragm 21. The diaphragm 41 has slits 46a and 46b formed in a direction perpendicular to a propagation direction of a Lamb wave with respect to the pair of comb-teeth shaped electrodes 50a and 50b. The slits 46a and 46b prevent stress in the direction perpendicular to the Lamb wave propagation direction from acting on a device area 45.