| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a force direction device hardly affected by temperature fluctuation, a robot, and an electronic component conveyance apparatus.SOLUTION: A force detection device 1 comprises; a first base 2, a second base 3, and an electric charge output element 10 disposed between the bases. The electric charge output element 10 includes a first detection plate constituted by a Y-cut quartz plate and a second detection plate constituted by a Y-cut quartz plate. The detection plates are laminated in a direction orthogonal to a normal line NLof a mounting surface 321 of the second base 3. The force detection device 1 detects external force on the basis of: a first output in response to shear force in a first detection direction orthogonal to a laminating direction LD of the first detection plate; and a second output in response to shear force in a second detection direction that is orthogonal to a laminating direction Ld of the second detection plate and intersects with the first detection direction.</p> |
