| 摘要 |
<p>PROBLEM TO BE SOLVED: To stick an adhesive sheet to an adherend in a state where smoothness of an adhesive layer is improved.SOLUTION: A sheet sticking device 10 includes: feed means 20 by which an original sheet RS to which an adhesive sheet AS is temporarily attached is fed out to one surface of a band-like exfoliation sheet RL; exfoliation means 30 by which the adhesive sheet AS is exfoliated from the original sheet RS fed out by the feed means 20; and pressing means 40 by which the adhesive sheet AS exfoliated by the exfoliation means 30 is pressed and stuck to a wafer WF as the adherend. The sheet sticking device also includes smoothing means 50 which improves smoothness of the adhesive sheet AS in a front stage for pressing the adhesive sheet AS to the wafer WF.</p> |
