发明名称 METAL TIP FOR USE IN SCANNING PROBE AND METHOD TO MANUFACTURE SUCH TIP
摘要 FIELD: measurement equipment.SUBSTANCE: invention relates to a metal tip for use in a scanning probe microscope and also to the method of its manufacturing. A tip (1) has axial length (l), radial length (d), sharpened part (B), which stretches in axial direction from a part with maximum axial length (5) to an atomically sharp end (9), and a blunt part (A), which stretches in axial direction from a part with maximum axial length (5) to the blunt end (7). The axial length of the sharpened part (B) is more than in the blunt part (A). The metal tip (1) has weight of 10 mcg or less.EFFECT: improved quality of a probe sensor.15 cl, 5 dwg
申请公布号 RU2550759(C2) 申请公布日期 2015.05.10
申请号 RU20120103249 申请日期 2010.08.02
申请人 SPEKS SERFEJS NANO ANALIZIS GMBKH 发明人 LAEGSGAARD EHRIK
分类号 G01Q70/10 主分类号 G01Q70/10
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