| 摘要 |
FIELD: electricity.SUBSTANCE: invention relates to the field of gas-discharge equipment, in particular to the electric arc evaporator for obtaining of tool coatings from solid materials. The electric arc evaporator is fitted with the system of magnetic fields for creation of magnetic fields on the target surface and above it. The system of magnetic fields comprises edge permanent magnets and at least one toroidal coil located behind a target, the coil-set internal diameter of which is preferably less or equal to the target diameter, the edge permanent magnets are shifted from the target perpendicular to the target surface, and the projection of the edge permanent magnets to the target surface in comparison with the projection of the toroidal coil surface targets is located farther from the center of the target surface. The edge permanent magnets are remove from the target depending on the increasing target erosion depth.EFFECT: improvement of stability of coating application.7 cl, 18 dwg |
