发明名称 |
METAL SURFACE TREATMENT APPARATUS AND METHOD USING THE SAME |
摘要 |
According to the present invention, a metal surface treatment device for surface-treating target metal heated at a surface-treatable temperature comprises: a reaction chamber having a shape corresponding to the outer surface shape of target metal and separated from the outer surface of the target metal within a constant gap to receive at least a part of the target metal; and a process gas supply part for supplying process gas required for an autocatalytic reaction to the target metal received in the reaction chamber. A metal surface treatment method using the metal surface treatment device comprises: a step of positioning the target metal in the reaction chamber, having a shape corresponding to the outer surface shape of the target metal and separated from the outer surface of the target metal within the constant gap to receive at least a part of the target metal; and a step of forming a process gas layer occurring by the autocatalytic reaction by supplying the process gas into the reaction chamber through the process gas supply part. The present invention can maintain high productivity and can have excellent surface treatment quality. |
申请公布号 |
KR20150050018(A) |
申请公布日期 |
2015.05.08 |
申请号 |
KR20130131328 |
申请日期 |
2013.10.31 |
申请人 |
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY |
发明人 |
KIM, JUN HO;JUNG, UOO CHANG;JO, HYUNG HO |
分类号 |
C23C8/24;C23C8/02;C23C8/80 |
主分类号 |
C23C8/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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