发明名称 THIN FILM DEPOSITING APPARATUS
摘要 According to an embodiment of the present invention, a thin film depositing apparatus includes a plurality of magnet mechanisms, as a chucking unit to make a mask adhere to one side of a substrate, to be magnetically joined to the mask by coming in contact with the other side of the substrate while being separately moved up by their own weights.
申请公布号 KR20150049645(A) 申请公布日期 2015.05.08
申请号 KR20130130457 申请日期 2013.10.30
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 CHUNG, KYUNG HOON;CHA, YOU MIN
分类号 C23C14/24;C23C14/04;H01L51/56;H05B33/10 主分类号 C23C14/24
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