发明名称 |
THIN FILM DEPOSITING APPARATUS |
摘要 |
According to an embodiment of the present invention, a thin film depositing apparatus includes a plurality of magnet mechanisms, as a chucking unit to make a mask adhere to one side of a substrate, to be magnetically joined to the mask by coming in contact with the other side of the substrate while being separately moved up by their own weights. |
申请公布号 |
KR20150049645(A) |
申请公布日期 |
2015.05.08 |
申请号 |
KR20130130457 |
申请日期 |
2013.10.30 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
CHUNG, KYUNG HOON;CHA, YOU MIN |
分类号 |
C23C14/24;C23C14/04;H01L51/56;H05B33/10 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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