PLASMA SHIELDING MEMBER, STRUCTURE FOR DETECTING PLASMA, AND PLASMA REACTION APPATUS

摘要

Disclosed are a plasma shielding member capable of preventing contamination or damage of a detecting member for detecting the light of plasma, a structure for detecting plasma, and a plasma reaction apparatus. The plasma shielding member according to the present invention comprises: a body which has a first surface and a second surface which are opposite to each other and a plurality of through holes which extend from the first surface toward the second surface individually; a narrow portion formed on one side of the through hole; and a wide portion formed on the other side of the through hole.