| 摘要 |
The present invention provides a kind of device for exposing and developing, and a method for exposing and developing. The device for exposing and developing of the present invention comprises: an edge exposure device for exposing an edge of a substrate; and a development device including the edge exposure device at an entrance thereof and for developing the exposed substrate, wherein when the substrate is transferred to the development device, the edge exposure device is allowed to proceed an edge exposure. The edge exposure device is installed in the entrance of the development device such that the edge exposure can be simultaneously completed in a process that the substrate moves toward the development device, whereby it is not necessary to transfer the substrate for several times and processes are shortened such that processing efficiency can be greatly enhanced. |
