ETCHING DEVICE, ETCHING METHOD USING THE SAME, AND MANUFACTURING METHOD FOR DISPLAY DEVICE

摘要

An electrode etching device comprises a container including an etching solution and a thermostat. The thermostat includes the container inside and a solvent for melting the etching solution by double-boiling. The etching solution is melted to generate etching steam and etches an electrode film formed on a substrate. The electrode film etching device can reduce the loss of the etching solution and provide an excellent etching profile with a low CD skew value and without waste residues by etching the electrode film through the etching steam.