| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate housing container which efficiently substitutes a gas and can increase the speed and improve the efficiency of the substitution operation, facilitates detachment of a lid from a container body, can smoothly process a substrate, and the like. <P>SOLUTION: The substrate housing container includes: a container body 1 for housing a semiconductor wafer; a lid 20 fitted into an opened front surface 7 of the container body 1; and a deformable seal gasket 30 interposed between the container body 1 and the lid 20. A seal formation surface 8 for the seal gasket 30 is formed in the inner periphery of the front surface of the container body 1, and an attachment groove 25 for the seal gasket 30 is formed in the peripheral edge of the rear surface of the lid 20. The seal gasket 30 is formed of a base 31 fitted into the attachment groove 25, an extending piece 33 projecting from the base 31, a first seal piece 35 which extends from the tip portion of the extending piece 33 and is brought into pressure contact with the seal formation surface 8, and a second seal piece 37 projecting from the extending piece 33, and the second seal piece 37 is orthogonal to the extending piece 33 and is brought into contact with an adjacent surface 9 adjacent to the seal formation surface 8. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
