Micromechanical sensor unit and method for manufacturing micromechanical sensor units

摘要

A method for manufacturing a micromechanical sensor unit, the micromechanical sensor unit including a substrate and a sealing cap, in the first method step the substrate and the sealing cap being configured and joined in such a way that, as a result of bonding the sealing cap and the substrate, a first cavity, which has a first pressure and in which a first sensor element is situated, and a second cavity, which has a second pressure and in which a second sensor element is situated, are manufactured, in a second method step a sealable channel leading into the first cavity being created, in a third method step the first pressure in the first cavity being established via the sealable channel.

主权项

1. A method for manufacturing a micromechanical sensor unit, the micromechanical sensor unit including a substrate and a sealing cap, the method comprising:
configuring and joining the substrate and the sealing cap so that, as a result of bonding the sealing cap and the substrate, a first cavity, which has a first pressure and in which a first sensor element is situated, and a second cavity, which has a second pressure and in which a second sensor element is situated, are created; creating a sealable channel leading into the first cavity; and changing the first pressure in the first cavity via the sealable channel.