发明名称 METHODS AND APPARATUSES HAVING STRINGS OF MEMORY CELLS INCLUDING A METAL SOURCE
摘要 Methods for forming a string of memory cells, an apparatus having a string of memory cells, and a system are disclosed. A method for forming the string of memory cells comprises forming a metal silicide source material over a substrate. The metal silicide source material is doped. A vertical string of memory cells is formed over the metal silicide source material. A semiconductor material is formed vertically and adjacent to the vertical string of memory cells and coupled to the metal silicide source material.
申请公布号 WO2015066447(A1) 申请公布日期 2015.05.07
申请号 WO2014US63377 申请日期 2014.10.31
申请人 MICRON TECHNOLOGY, INC. 发明人 LU, ZHENYU;LINDSAY, ROGER W.;BICKSLER, ANDREW;HU, YONGJUN JEFF;LIU, HAITAO
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
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