发明名称 METHOD OF MANUFACTURING MICRO-CANTILEVER
摘要 The present invention may comprise the steps of: forming, to correspond to the thickness of a micro-cantilever, a cantilever synthetic resin of liquid phase for a micro-cantilever on the top side of a base block having a junction base and a non-junction base; and curing the cantilever synthetic resin of liquid phase so as to pass through the boundary of the junction base and the non-junction base, wherein the junction base has relatively stronger junction properties than the non-junction base with respect to the cured cantilever synthetic resin.
申请公布号 WO2015064816(A1) 申请公布日期 2015.05.07
申请号 WO2013KR10515 申请日期 2013.11.19
申请人 INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANGUNIVERSITY 发明人 LEE, JUNG CHUL;LEE, IL
分类号 B81C1/00;G01N33/00 主分类号 B81C1/00
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