PEELING SYSTEM, PEELING METHOD, PROGRAM, AND COMPUTER STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To efficiently perform peeling processing between a processed substrate and a support substrate.SOLUTION: A peeling system 1 includes: a first processing block 10 for performing processing to a superposed substrate T and a processed substrate W; and a second processing block 20 for performing processing to a support substrate S. The first processing block 10 includes: a carry-in/carry-out station 11; a standby station 12; a first transfer region 13; a peeling station 14; and a cleaning station 15. The second processing block 20 includes a first delivery station 21, a second delivery station 22, a second transportation region 23, and a carry-out station 24.