摘要 |
<p>PROBLEM TO BE SOLVED: To provide a piezoelectric element the characteristic variation of which is small, and to provide a piezoelectric substrate, and a liquid ejection head using the same, a recorder, and a method of manufacturing such a piezoelectric element.SOLUTION: A displacement element is a piezoelectric element having a piezoelectric ceramic layer 21b, a pair of electrodes 24, 25, and a recess 32 arranged in the piezoelectric ceramic layer 21b. The recess 32 is constituted by laminating a piezoelectric ceramic green sheet 121bb having a through hole 132b becoming the wall of the recess 32, and other piezoelectric ceramic green sheet 121ba becoming the bottom 132a of the recess 32, and then calcining the laminate.</p> |