发明名称 半導体装置
摘要 <p>A hetero-junction field effect transistor is formed by a GaN layer (1) and AlGaN layer (2) stacked in this order on a substrate, and a gate electrode, source electrode, and drain electrode formed on the substrate, the hetero-junction field effect transistor being formed on the active region of the AlGaN layer (2). A drain electrode pad (31), comprising a bonding-capable region (31a) which is formed upon the AlGaN layer (2) outside the active region of the hetero-junction field effect transistor with an insulator film (30) interposed therebetween, is connected to the drain electrode. A gate electrode extension part (14), which is connected to the gate electrode, is formed on the AlGaN layer (2) and between the source electrode and the bonding-capable region (31a) of the drain electrode pad (31). Provided is a semiconductor device with which it is possible to improve resilience to pressure between a source electrode, and a bonding-capable region of a drain electrode pad which is formed on an insulator film without an interlayer insulator film, without increasing the element size.</p>
申请公布号 JP5712231(B2) 申请公布日期 2015.05.07
申请号 JP20120557863 申请日期 2012.01.24
申请人 发明人
分类号 H01L21/338;H01L21/28;H01L21/336;H01L29/06;H01L29/41;H01L29/778;H01L29/78;H01L29/812 主分类号 H01L21/338
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