发明名称 摩擦力顕微鏡
摘要 <p>Provided is a friction force microscope that can measure a friction force by a cantilever in a quantitative manner. The friction force microscope includes a friction force calculating mechanism that calculates an effective probe height and a torsional spring constant of the cantilever from bending sensitivity determined from displacement information in a bending direction of the cantilever and torsional sensitivity determined from displacement information in a torsional direction of the cantilever, respectively, so as to use the calculated values for calculating the friction force.</p>
申请公布号 JP5714941(B2) 申请公布日期 2015.05.07
申请号 JP20110048198 申请日期 2011.03.04
申请人 发明人
分类号 G01Q60/26 主分类号 G01Q60/26
代理机构 代理人
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