IMAGE ACQUISITION APPARATUS AND IMAGE ACQUISITION METHOD

摘要

An image acquisition apparatus includes first and second imaging elements, an image formation optical system, a subject stage that supports a subject, and a control unit. The image formation optical system forms an image of the subject on light-receiving surfaces of the first and second imaging elements. The control unit acquires imaging results by imaging a correction mark disposed on the subject stage while changing a relative position between the first imaging element and the correction mark in an optical axis direction of the image formation optical system. The control unit moves, in accordance with the imaging results, the first imaging element or subject stage in the optical axis direction so the first imaging element and the correction mark are conjugate, acquires an imaging result by imaging the correction mark, and moves, in accordance with the acquired imaging result, the second imaging element in the optical axis direction.

主权项

1. An image acquisition apparatus, comprising:
a first imaging element; a second imaging element; an image formation optical system configured to form an image of a subject on light-receiving surfaces of the first and second imaging elements; a subject stage configured to support the subject; and a control unit, wherein the control unit controls to acquire a plurality of imaging results by imaging, by the first imaging element, a correction mark disposed on the subject stage while changing a relative position between the first imaging element and the correction mark in an optical axis direction of the image formation optical system, move, in accordance with the plurality of imaging results of the first imaging element, the first imaging element or the subject stage in the optical axis direction so that the first imaging element and the correction mark are conjugate, acquire an imaging result by imaging the correction mark by the second imaging element, and move, in accordance with the imaging result of the second imaging element, the second imaging element in the optical axis direction.