发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a small-size semiconductor device, capable of facilitating microfabrication of pitches between pad electrodes in an IC chip, and a method of manufacturing the semiconductor device.SOLUTION: A semiconductor device comprises: a pad electrode provided on a first surface of a semiconductor substrate; and an external connection electrode corresponding to the pad electrode, which is provided on a second surface. A side surface connecting the first surface and the second surface of the semiconductor substrate is an inclined surface which is visually recognized when the first surface is viewed in a planar view. Part of inter-electrode wiring connecting the electrode and the corresponding external connection electrode is provided on the side surface.</p>
申请公布号 JP2015088578(A) 申请公布日期 2015.05.07
申请号 JP20130225051 申请日期 2013.10.30
申请人 SEIKO EPSON CORP 发明人 YOSHIIKE MASASHI
分类号 H01L21/3205;H01L21/768;H01L23/12;H01L23/522;H01L25/10;H01L25/11;H01L25/18 主分类号 H01L21/3205
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