SEALING SURFACE, IN PARTICULAR FOR A VACUUM CHAMBER OF A MASS SPECTROMETER AND METHOD OF MANUFACTURING SUCH A SEALING SURFACE

摘要

A sealing surface, in particular for a vacuum chamber of a mass spectrometer and an associated manufacturing process, has non-circular shapes and can be produced with low effort. The sealing surface has circumferential cracks, being produced by erosion or jet machining or indentation-forming. A method manufactures such a sealing surface, a component has such a sealing surface, a vacuum chamber is made of components with such sealing surfaces and a mass spectrometer has such a vacuum chamber. In the prior art annular sealing surfaces are produced by turning. Milling permits a non-annular embodiment but is disadvantageous in case of sealing.

主权项

1. Sealing surface, in particular for a vacuum chamber, wherein the sealing surface (7, 7′) has circumferential cracks (11, 11′), which are produced by means of erosion, jet machining or indentation-forming.