<p>Disclosed is a coolant injection device used in a wire saw apparatus. The present invention relates to a coolant injection device that is designed to inject a coolant through a double pipe in a wire saw apparatus for cutting an ingot into a wafer size to realize uniform cooling, thereby enhancing quality of a wafer. The coolant injection device according to the present invention comprises an inner pipe connected to a coolant supply pipe to make a coolant supplied thereinto and having a discharge hole formed therein for discharging the coolant to the outside, and an outer pipe in which the inner pipe is installed with a space therebetween and including a nozzle which the coolant discharged through the discharge hole is collected and then discharged from.</p>
申请公布号
WO2015064866(A1)
申请公布日期
2015.05.07
申请号
WO2014KR03763
申请日期
2014.04.29
申请人
WOONGJIN ENERGY CO., LTD.
发明人
KANG, IN HO;LEE, YOUNG JUN;JEONG, JAE HUN;OH, DAE KYUN;HAHN, YOUNG SIK;CHOI, HYO IL;KIM, NAM KI;KIM, DONG JIN;BAE, DONG WOO;JUNG, SEUNG GU;LEE, BO RAM;SHIN, YONG WON