| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of collecting foreign substances in a processing liquid at a high collection rate.SOLUTION: At discharging from a nozzle 7 a processing liquid from a processing liquid vessel 60, the secondary side of a pump 70 is connected to the primary side of a filter 52, so that a resist liquid L passing through the filter 52 is returned to the supply source side, and the returned processing liquid is synthesized with a processing liquid supplemented from the processing liquid vessel 60. In at least one of the case when returning the processing liquid to a buffer tank 61 and the case when sucking the synthesized resist liquid L into the pump 70, it is made to pass through the filter 52. This enables collection of foreign substances in the processing liquid at a high collection rate, while suppressing the number of filters 52, for example, using one filter 52. |
