发明名称 品質推定装置、品質推定方法及び品質推定方法をコンピュータに実行させるためのプログラム
摘要 <p>According to one embodiment, a quality estimation apparatus includes: a storage module which stores designation information for designating inspection targets to be subjected to sampling inspection in estimation targets including the inspection targets and non-inspection targets, characteristic values obtained by the sampling inspection of the inspection targets and criterion information for determining qualities of the inspection targets based on the characteristic values; a threshold value calculator which calculates threshold values indicating qualities of the inspection targets from the characteristic values of the inspection targets by using the criterion information; and a clustering module which classifies the estimation targets in clusters so that the clusters have probability distributions with the threshold values used as a variable.</p>
申请公布号 JP5715445(B2) 申请公布日期 2015.05.07
申请号 JP20110042464 申请日期 2011.02.28
申请人 发明人
分类号 H01L21/02;G05B19/418;G06Q50/04;H01L21/66 主分类号 H01L21/02
代理机构 代理人
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