Method and Apparatus for Authenticating a Semiconductor Die

摘要

The present disclosure describes apparatuses and techniques for device-based die authentication. In some aspects, an intensity of a particle beam is varied during semiconductor processing to provide a semiconductor die having devices of varied values. In other aspects, different areas of semiconductor dies are exposed during semiconductor processing to provide semiconductor dies with devices that vary in value from one die to the next. For each semiconductor die, a value generated based on the values of the die's respective devices can be associated with that die thereby enabling subsequent authentication of the semiconductor die.

主权项

1. A method comprising:
applying, to a semiconductor layer of a die, a mask configured to expose areas of the semiconductor layer that correspond to a subset of devices defined by the structure of the die; varying an intensity of a particle beam applied to the exposed areas of the semiconductor layer effective to vary respective values of the subset of devices; generating, via a circuit comprising the subset of devices, a numerical value based on the respective values of the subset of devices; and writing the numerical value to a non-volatile memory of the die to associate the numerical value with the die to enable subsequent authentication of the die based on the respective values of the subset of devices.