发明名称 UNNECESSARY VIBRATION DETECTION METHOD, AND VIBRATION ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide an unnecessary vibration detection method, and a vibration element that can accurately detect unnecessary vibration while preventing deterioration of the vibration element.SOLUTION: An unnecessary vibration detection method arranges a sensing electrode 500A while being separated apart from a driving vibration arm 221, a detection vibration arm, a first detection signal electrode, a second detection signal electrode, a driving signal electrode 331, and a driving ground electrode, and detects the presence or absence of unnecessary vibration which vibrates in a direction intersecting an ideal vibration direction on the basis of a variation of capacitance between each electrode and each sensing electrode when the driving vibration arm 221 is vibrated.
申请公布号 JP2015087206(A) 申请公布日期 2015.05.07
申请号 JP20130225045 申请日期 2013.10.30
申请人 SEIKO EPSON CORP 发明人 NAKAGAWA HIROSHI;NISHIZAWA RYUTA
分类号 G01C19/5628;G01C19/5663;H01L41/047;H01L41/113 主分类号 G01C19/5628
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