| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a micropore inspection apparatus capable of quickly performing an inspection and obtaining an inspection result adapted to actual situations. <P>SOLUTION: The micropore inspection apparatus includes: a housing 110; a speaker 120 arranged on the one-end face side of the housing 110 and capable of outputting a low frequency sound; a microphone 130 for outputting a predetermined electric signal when a diaphragm 132 is vibrated in response to the low frequency sound; and a partition member 150 arranged on the opposite side to the one-end face of the housing 110 and including a microphone attaching face 150a, a component placing face 150b and an air passage hole 151 for passing air vibration generated due to the vibration of the diaphragm 132. By outputting the low frequency sound from the speaker 120 in a state that a component 140 is place on the component placing face 150b so that a micropore 141 is connected to the air passage hole 151, a signal depending on a flow rate of air when air passed through the air passage hole 151 passes the micropore 141 is outputted from the microphone 130 as an electric signal. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
