发明名称 半導体装置の製造方法
摘要 <p>According to one embodiment, a manufacturing method of a semiconductor device includes a step of forming a dummy-fin semiconductor on a semiconductor substrate; a step of forming an insulating layer, into which a lower part of the dummy-fin semiconductor is buried, on the semiconductor substrate; a step of forming a fin semiconductor, which is bonded to a side face at an upper part of the dummy-fin semiconductor, on the insulating layer; and a step of removing the dummy-fin semiconductor on the insulating layer with the fin semiconductor being left on the insulating layer.</p>
申请公布号 JP5713837(B2) 申请公布日期 2015.05.07
申请号 JP20110174712 申请日期 2011.08.10
申请人 发明人
分类号 H01L21/336;H01L29/78;H01L29/786 主分类号 H01L21/336
代理机构 代理人
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