| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To accurately measure a shape of a surface which is not smooth like as a diffraction optical element. <P>SOLUTION: First measurement data is obtained by making a probe scan along a first scanning track. Next, the probe is made to scan along a second scanning track passing through the same range of a predetermined resolution as the first scanning track and having a scanning direction opposite to the first scanning track, thereby obtaining second measurement data. A stable section and an unstable section of those measurement data are extracted. The measurement data of the stable section are selected, and a surface shape is computed on the basis of the measurement data after the selection. Therefore, the shape of a surface which is not smooth can be accurately measured. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
