APPARATUS AND METHOD FOR FABRICATING PERIODIC MICRO-PATTERN BY LASER BEAMS

摘要

The invention provides an apparatus for fabricating a periodic micro-pattern by laser beams. The apparatus includes an ultrafast laser light source configured to generate an output laser beam. A diffraction optical element is configured to divide the output laser beam into a plurality of diffractive laser beams. A confocal system is configured to focus the plurality of diffractive laser beams on a focal point, so that the plurality of diffractive laser beams produces an interference light beam with interference phenomena. The interference light beam ablates a surface of an element to fabricate a periodic micro-pattern on the surface of the element. The confocal system includes a first lens, a second lens and a light shielding mask. The plurality of diffractive laser beams passes through the first lens, the light shielding mask and the second lens in sequence.

主权项

1. An apparatus for fabricating a periodic micro-pattern by laser beam, comprising:
an ultrafast laser light source configured to generate an output laser beam; a diffraction optical element configured to divide the output laser beam into a plurality of diffractive laser beams; and a confocal system configured to focus the plurality of diffractive laser beams on a focal point, so that the plurality of diffractive laser beams produces an interference light beam with interference phenomena, wherein the interference light beam ablates a surface of an element to fabricate a periodic micro-pattern on the surface of the element, wherein the confocal system comprises:
a first lens configured for the plurality of diffractive laser beams being incident thereto to produce a plurality of first collimated laser beams;a light shielding mask having a plurality of holes, configured for the plurality of first collimated laser beams being incident thereto to produce a plurality of second collimated laser beams; anda second lens configured to focus the plurality of second collimated laser beams to a focal point of the second lens,wherein the first lens, the second lens and the light shielding mask are arranged along an optical axis of the output laser beam, and the light shielding mask is disposed between the first lens and the second lens, so that the plurality of diffractive laser beams passes through the first lens, the light shielding mask and the second lens in sequence.