MASS DISTRIBUTION MEASUREMENT METHOD AND MASS DISTRIBUTION MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a mass distribution analysis method capable of correcting occurrence time variations of a secondary ion generated when obliquely irradiating a sample with a spread ionized beam and measuring a highly-reliable mass distribution.SOLUTION: A method for acquiring mass spectral distribution information of a projected TOF type includes: a first step of acquiring first mass spectral distribution information of a secondary ion generated from a sample by irradiating a surface of the sample with a first ionized beam; a second step of acquiring second mass spectral distribution information of a secondary ion generated from a sample by irradiating the surface of the sample with a second ionized ion; and a third step of correcting the second mass spectral distribution information using the first mass spectral distribution information. The third step further includes a step of correcting a delay distribution of secondary ion occurrence time in the second mass spectral distribution information on the basis of the first mass spectral distribution information.