| 摘要 |
<p>PROBLEM TO BE SOLVED: To solve such a problem that sediment is produced in a neutralizer when hollow cathode type neutralizer is used, and if a neutralizer is used when manufacturing an electronic component by means of an ion beam, the sediment drops on a substrate while processing to produce particles thus causing failure of the product and lowering the yield.SOLUTION: In a hollow cathode type neutralizer provided in an ion beam processing apparatus so as to neutralize the ion beam, the anode and cathod of the neutralizer are composed of materials having the same coefficient of thermal expansion.</p> |
