发明名称 X線タルボ干渉計用回折格子及びその製造方法、並びにX線タルボ干渉計
摘要 <p>Provided are a diffraction grating for an X-ray Talbot interferometer, a method of manufacturing the same, and an X-ray Talbot interferometer, the method enabling easy and highly accurate manufacturing of a diffraction grating having grooves with a high aspect ratio. The diffraction grating for an X-ray Talbot interferometer includes a plurality of ridge-like X-ray absorbing portions (20b) formed on a substrate (22) along one direction at predetermined intervals through cutting of a metal film.</p>
申请公布号 JP5714968(B2) 申请公布日期 2015.05.07
申请号 JP20110090606 申请日期 2011.04.15
申请人 发明人
分类号 G01T7/00;G01N23/20 主分类号 G01T7/00
代理机构 代理人
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