PLASMA GENERATING APPARATUS

摘要

Disclosed herein is a plasma generating apparatus capable of sufficiently performing a deodorization function and a sterilization function by increasing a generation amount of ions or radicals while suppressing generation of ozone. The plasma generating apparatus has a pair of electrodes (21 and 22) provided with dielectric films (21a and 22a) and serves to apply a predetermined voltage between the electrodes (21 and 22) to discharge plasma, fluid circulation holes (21b and 22b) are respectively provided at corresponding positions of the respective electrodes (21 and 22) and pass through the electrodes, and plasma is generated only in opening end portions (21x and 22x) forming the fluid circulation holes (21b and 22b) between the pair of electrodes (21 and 22).

主权项

1. A plasma generating apparatus which has a pair of electrodes provided with a dielectric film on at least one side of facing surfaces thereof and serves to apply a predetermined voltage between the electrodes to discharge plasma, wherein fluid circulation holes are respectively provided at corresponding positions of the respective electrodes and pass through the electrodes and plasma is generated only in opening end portions forming the fluid circulation holes between the pair of electrodes.