发明名称 |
THIN FILM PRODUCTION METHOD AND TRANSPARENT CONDUCTIVE FILM |
摘要 |
The purpose of the present invention is to provide, as a technique for obtaining a thin film, a new method to take the place of conventional techniques. This thin film production method is characterized by including the following: a misting step for misting a dispersion solution containing fine particles; a supply step for supplying the misted dispersion solution to a substrate; and a drying step for drying the dispersion fluid that was supplied onto the substrate. |
申请公布号 |
WO2015064438(A1) |
申请公布日期 |
2015.05.07 |
申请号 |
WO2014JP78064 |
申请日期 |
2014.10.22 |
申请人 |
NIKON CORPORATION |
发明人 |
NISHI YASUTAKA;NAKAZUMI MAKOTO |
分类号 |
B05D7/24;B05D1/12;B05D3/06;C01G9/02;C01G19/00;H01B5/14;H01B13/00 |
主分类号 |
B05D7/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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