发明名称 THIN FILM PRODUCTION METHOD AND TRANSPARENT CONDUCTIVE FILM
摘要 The purpose of the present invention is to provide, as a technique for obtaining a thin film, a new method to take the place of conventional techniques. This thin film production method is characterized by including the following: a misting step for misting a dispersion solution containing fine particles; a supply step for supplying the misted dispersion solution to a substrate; and a drying step for drying the dispersion fluid that was supplied onto the substrate.
申请公布号 WO2015064438(A1) 申请公布日期 2015.05.07
申请号 WO2014JP78064 申请日期 2014.10.22
申请人 NIKON CORPORATION 发明人 NISHI YASUTAKA;NAKAZUMI MAKOTO
分类号 B05D7/24;B05D1/12;B05D3/06;C01G9/02;C01G19/00;H01B5/14;H01B13/00 主分类号 B05D7/24
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