发明名称 CUTTING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a cutting device capable of measuring accurately a use limit of a cutting blade.SOLUTION: The cutting device, which is provided with: a chuck table for holding a plate-like work piece; cutting means that cuts the work piece held by the chuck table using a cutting blade; and processing/feeding means that relatively processes and feeds the chuck table and the cutting means, comprises: three-dimensionally measuring means that measures three-dimensionally the work piece in an X-axis direction, a Y-axis direction and Z-axis direction which are orthogonal to each other and acquires shape information; treatment means that treats the information acquired by the three-dimensionally measuring means and generates image information; and outputting means that outputs an image generated by the treatment means. A cut groove of the work piece cut by the cutting blade is measured by the three-dimensionally measuring means, and the image information treated by the treatment means includes shape information of the cross section of the cut groove.</p>
申请公布号 JP2015085398(A) 申请公布日期 2015.05.07
申请号 JP20130223215 申请日期 2013.10.28
申请人 DISCO ABRASIVE SYST LTD 发明人 ITO YUSAKU;TAKEYAMA KOICHI;OBA RYUGO
分类号 B24B49/12;B24B27/06;H01L21/301 主分类号 B24B49/12
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