发明名称 IMAGE SENSOR USING BACKSIDE ILLUMINATION PHOTODIODE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a technology capable of simplifying a process and securing a misalignment margin when bonding two wafers to manufacture an image sensor using backside illumination photodiodes.SOLUTION: When manufacturing an image sensor through a 3D CIS manufacturing process, two wafers, that is, a first wafer and a second wafer, are electrically connected using vias of one of the two wafers and bonding pads of the other wafer. In addition, when manufacturing an image sensor through the 3D CIS manufacturing process, two wafers are electrically connected using vias of the two wafers.</p>
申请公布号 JP2015088759(A) 申请公布日期 2015.05.07
申请号 JP20140222112 申请日期 2014.10.31
申请人 SILICONFILE TECHNOLOGIES INC 发明人 PARK JAE YOUNG;WON JUN HO;LEE YOUNG HA;LEE DO YOUNG
分类号 H01L27/146;H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L27/146
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