| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cleaning agent for magnetic disk substrate having a satisfied dispersibility of particle desorbed from a substrate surface and also an excellent re-adhering prevention property, by comprising an excellent cleaning ability to the particle derived from a metallic ion represented by iron ion eluted from a device for use at a manufacturing process and also by comprising an appropriate etching property. <P>SOLUTION: The cleaning agent for magnetic disk substrate includes following materials as essential components: oxy-carboxylic acid (A); a chelating agent (B) other than oxy-carboxylic acid, of which the logarithmic value of a chelate stability constant to trivalent iron ion at pH 6.0 is 7.0 or more; and alkanolamine (C). <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
