WAFER CONTAINER WITH DOOR INTERFACE SEAL

摘要

A wafer container may be a front opening wafer container comprising a container portion and a door, one of the container portion and the door having a radially installed seal with a plurality of opposing lateral projections that deflect from a normal position in a direction away from an install direction when the seal is installed in a groove, the lateral projections resisting removal of the seal after the seal is seated in the groove. A core portion and a cantilevered finger member engages the other of the door and container portion when the door is seated in the container portion. Other lateral projections on the seal effectively seal the path between the seal and groove surfaces.

主权项

1. A substrate container having a container portion with a door frame defining an open side and a door to latch to the door frame and close the open side, one of the door and door frame having a groove with a pair of sidewalls extending around a periphery of said one with a seal installed in said groove, the seal engageable with the other of the door and door frame for sealing the door to the container portion, the seal having a pedestal portion seated in a bottom of the groove, the pedestal portion engaging each of the sidewalls, a core portion extending from the pedestal to a top of the seal, a plurality of opposing pairs of projections for engaging opposing sidewalls of the groove extending from the core portion, at least one pair sized to be larger than the groove at a position corresponding to the at least one pair of projections whereby the projections are angled upwardly and inhibit removal of the seal from the groove, another pair of projections extend directly laterally outwardly engaging the sidewalls, and positioned above the pair of projections that are angled upwardly.