| 发明名称 |
CRYOPUMP SYSTEM |
| 摘要 |
A cryopump system includes: a plurality of cryopumps connected to a common roughing pump in a rough line and provided with a plurality of rough valves in the rough line, respectively; and a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps. A delay time is set between closing of an open one of the plurality of rough valves and opening of a closed one of the plurality of rough valves. The controller applies the delay time uniformly upon closing of each of the rough valves. |
| 申请公布号 |
US2015121907(A1) |
申请公布日期 |
2015.05.07 |
| 申请号 |
US201514596837 |
申请日期 |
2015.01.14 |
| 申请人 |
Sumitomo Heavy Industries, Ltd. |
发明人 |
Ando Masamichi |
| 分类号 |
B01D8/00 |
主分类号 |
B01D8/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A cryopump system comprising:
a plurality of cryopumps connected to a common roughing pump in a rough line and provided with a plurality of rough valves in the rough line, respectively; and a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps, wherein a delay time is set between closing of an open one of the plurality of rough valves and opening of a closed one of the plurality of rough valves, wherein the controller applies the delay time uniformly upon closing of each of the rough valves. |
| 地址 |
Tokyo JP |
