| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a micro displacement measurement system configured to change moving-amount magnification of a moire fringe without configuration change or additional imaging.SOLUTION: A micro displacement measurement system includes: a marker arranged on an object to be measured and having a fringe pattern; a camera 12 for imaging the marker; and an image processing apparatus which creates reference grating image data on the basis of the image captured by the camera 12, a predetermined length of marker interval, and a predetermined moving-amount magnification, and generates moire fringe data from the captured image and the reference grating image data, to measure micro displacement. The moving-amount magnification of a moire fringe can be changed without configuration change or additional imaging.</p> |
