| 摘要 |
<p>A roll-to-roll thin film coating machine (1) of the invention includes: a first vacuum chamber (21) into which a first precursor gas is introduced; a second vacuum chamber (22) into which a second precursor gas is introduced; a third vacuum chamber (23) into which a purge gas is introduced, the purge gas discharging the first precursors and the second precursors; and a transfer mechanism (41a, 41b) transferring a windable base member (15) through the first vacuum chamber (21), the second vacuum chamber (22), and the third vacuum chamber (23), the transfer mechanism including a holding unit holding both end portions of the base member (15) in a width direction thereof.</p> |
