| 主权项 |
1. A pressure sensor, comprising
a first substrate containing a processing circuit integrated thereon, a cap attached to the first substrate wherein the cap includes a container, a holder, and one or more suspension elements for suspending the container from the holder, the container including a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor, the container being suspended from the holder such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port, and sensing means for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. |
