发明名称 |
PRINTED CHEMICAL MECHANICAL POLISHING PAD HAVING ABRASIVES THEREIN |
摘要 |
A method of fabricating a polishing layer of a polishing pad includes determining a desired distribution of particles to be embedded within a polymer matrix of the polishing layer. A plurality of layers of the polymer matrix is successively deposited with a 3D printer, each layer of the plurality of layers of polymer matrix being deposited by ejecting a polymer matrix precursor from a nozzle. A plurality of layers of the particles is successively deposited according to the desired distribution with the 3D printer. The polymer matrix precursor is solidified into a polymer matrix having the particles embedded in the desired distribution. |
申请公布号 |
WO2015065793(A1) |
申请公布日期 |
2015.05.07 |
申请号 |
WO2014US61838 |
申请日期 |
2014.10.22 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
KRISHNAN, KASIRAMAN;PATIBANDLA, NAG, B.;GOPALAN, PERIYA |
分类号 |
H01L21/304;B24B37/20 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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