发明名称 VIBRATION ELEMENT, PHYSICAL QUANTITY DETECTION DEVICE, ELECTRONIC APPARATUS AND MOVABLE BODY
摘要 PROBLEM TO BE SOLVED: To provide a vibration element capable of suppressing occurrence of electrostatic coupling.SOLUTION: A vibration element 100 includes: a driving input electrode 30 input with a signal for driving a vibration arm 20; a drive output electrode 32 for outputting the signal on the basis of flexure of the vibration arm 20; a first detection electrode 40 and a second detection electrode 42 for detecting the signal on the basis of the flexure of a vibration arm 22 due to Coriolis force; driving input wiring 50 provided on a base portion 10 and connected to the driving input electrode 30; drive output wiring 52 provided on the base portion 10 and connected to the drive output electrode 32; first detection wiring 60 provided on the base portion 10 and connected to the first detection electrode 40; second detection wiring 62 provided on the base portion 10 and connected to the second detection electrode 42; and fixed potential wiring 70 provided between the driving input wiring 50 and the first detection wiring 60 and between the driving input wiring 50 and the second detection wiring 62 as viewed in a plan view and input with a fixed potential.
申请公布号 JP2015087251(A) 申请公布日期 2015.05.07
申请号 JP20130225923 申请日期 2013.10.30
申请人 SEIKO EPSON CORP 发明人 NISHIZAWA RYUTA;YAMAGUCHI KEIICHI
分类号 G01C19/5628;G01C19/5614 主分类号 G01C19/5628
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