SPUTTERING DEVICE AND CONVEYANCE TOOL FOR SPUTTERING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a sputtering device that has a member to be filmed arranged so that a surface to be filmed faces in a horizontal direction and that can form a film over the entire surface to be filmed.SOLUTION: A sputtering device 1 includes a film deposition room 10, a target 11, and a conveyance tool 20. The target 11 is arranged in the film deposition room 10 along a perpendicular direction. The conveyance jig 20 faces the target 11. The conveyance tool 20 is fitted with a member 21 to be filmed. The conveyance tool 20 includes a plurality of installation surfaces 22 for installing the member 21 to be filmed and a support member 23. The plurality of installation surfaces 22 are arranged along the perpendicular direction. The support member 23 projects from the installation surfaces 22. The support member 23 supports a lower end face 21b of the member 21 to be filmed which is installed on the installation surfaces 22. The installation surfaces 22 are each inclined to the perpendicular direction so that a lower part is positioned more on the side of the target 11 than an upper part.