WORKING FLUIDS FOR HIGH FREQUENCY ELEVATED TEMPERATURE THERMO-PNEUMATIC ACTUATION

摘要

Provided is a thermo-pneumatic actuator which can include a substrate, an insulating layer formed on the substrate, a working fluid disposed in a fluid chamber, an ink chamber separated from the fluid chamber by at least a portion of the device layer comprising an actuatable membrane, and a heating element formed between the insulating layer and the fluid chamber. A boiling point temperature of the working fluid in the fluid chamber is in the range of greater than about 100° C. to about 500° C.

主权项

1. A thermo-pneumatic actuator, comprising:
a substrate; an insulating layer formed on the substrate; a working fluid disposed in a fluid chamber; an ink chamber separated from the fluid chamber by at least a portion of the device layer comprising an actuatable membrane; and a heating element formed between the insulating layer and the fluid chamber, wherein a boiling point temperature of the working fluid in the fluid chamber is in the range of greater than about 100° C. to about 500° C.