发明名称 Computer-readable storage medium, generating method, generating apparatus, driving apparatus, processing apparatus, lithography apparatus, and method of manufacturing article
摘要 The present invention provides a computer-readable storage medium which stores a program for causing a computer to generate time-series data of an electric current to be supplied to a motor in order to cause, a control system, including the motor configured to drive an object, to transit from a first state to a second state, the program causing the computer to generate the time-series data so as to satisfy a constraint including a condition to constrain an upper limit value of dispersion of a plurality of state quantities respectively obtained from a plurality of models each of which estimates, from the time-series data, a state quantity of a specific mode of a vibration mode and motion mode of the object, and so that a value of an evaluation function for evaluating the time-series data falls within a tolerance.
申请公布号 EP2869121(A1) 申请公布日期 2015.05.06
申请号 EP20140003575 申请日期 2014.10.20
申请人 CANON KABUSHIKI KAISHA 发明人 UEDA, SHINJI
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
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