发明名称 METHOD FOR FABRICATING NANOPATTERNED SUBSTRATE FOR HIGH-EFFICIENCY NITRIDE-BASED LIGHT-EMITTING DIODE
摘要 <p>Provided is a method of manufacturing a nitride-based light emitting diode. According to the method, a substrate having a nano to micron sized pattern including a bottom section and a convex section, wherein a lower end diameter of the convex section is 0.1 to 3 times a light emitting wavelength of the light emitting diode, and a buffer layer formed on the substrate and formed as a GaN layer are manufactured. According to the method of manufacturing the nitride-based light emitting diode, light extraction is significantly improved, and the nano to micron sized pattern, economically formed.</p>
申请公布号 EP2840618(A4) 申请公布日期 2015.05.06
申请号 EP20130777801 申请日期 2013.04.16
申请人 HUNETPLUS CO., LTD. 发明人 CHA, HYUK-JIN;LEE, HEON;CHOI, EUN-SEO
分类号 H01L33/20;G03F7/00;H01L21/02;H01L33/00;H01L33/22 主分类号 H01L33/20
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